Etymology
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Words related to vaporize

vapor (n.)
late 14c., from Anglo-French vapour, Old French vapor "moisture, vapor" (13c., Modern French vapeur) and directly from Latin vaporem (nominative vapor) "a warm exhalation, steam, heat," which is of unknown origin. Vapors "fit of fainting, hysteria, etc." is 1660s, from medieval notion of "exhalations" from the stomach or other organs affecting the brain.
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-ize 

word-forming element used to make verbs, Middle English -isen, from Old French -iser/-izer, from Late Latin -izare, from Greek -izein, a verb-forming element denoting the doing of the noun or adjective to which it is attached.

The variation of -ize and -ise began in Old French and Middle English, perhaps aided by a few words (such as surprise, see below) where the ending is French or Latin, not Greek. With the classical revival, English partially reverted to the correct Greek -z- spelling from late 16c. But the 1694 edition of the authoritative French Academy dictionary standardized the spellings as -s-, which influenced English.

In Britain, despite the opposition to it (at least formerly) of OED, Encyclopaedia Britannica, the Times of London, and Fowler, -ise remains dominant. Fowler thinks this is to avoid the difficulty of remembering the short list of common words not from Greek which must be spelled with an -s- (such as advertise, devise, surprise). American English has always favored -ize. The spelling variation involves about 200 English verbs.

vaporization (n.)
also vaporisation, 1788, noun of action from vaporize. In same sense Middle English had vaporacioun (late 14c.).
vaporizer (n.)
1846, agent noun from vaporize.