word forming element indicating "oneself," also "automatic," from Old English use of self (pron.) in compounds, such as selfbana "suicide," selflice "self-love, pride, vanity, egotism," selfwill "free will." Middle English had self-witte "one's own knowledge and intelligence" (early 15c.).
OED counts 13 such compounds in Old English. Middle English Compendium lists four, counting the self-will group as a whole. It re-emerges as a living word-forming element mid-16c., "probably to a great extent by imitation or reminiscence of Greek compounds in (auto-)," and formed a great many words in the pamphlet disputes of the 17c.
Middle English aware, from late Old English gewær "watchful, vigilant," from Proto-Germanic *ga-waraz (source also of Old Saxon giwar, Middle Dutch gheware, Old High German giwar, German gewahr), from *ga-, intensive prefix, + *waraz "wary, cautious" (from PIE root *wer- (3) "perceive, watch out for").
<a href="https://www.etymonline.com/word/self-aware">Etymology of self-aware by etymonline</a>
Harper, D. (n.d.). Etymology of self-aware. Online Etymology Dictionary. Retrieved $(datetime), from https://www.etymonline.com/word/self-aware