Old English he, pronoun of the third person (see paradigm of Old English third person pronoun below), from Proto-Germanic *hi- (source also of Old Saxon, Old Frisian, Middle Dutch he, hi, Dutch hy, Old High German he), from PIE *ki-, variant of root *ko-, the "this, here" (as opposed to "that, there") root, and thus the source of the third person pronouns in Old English. The feminine, hio, was replaced in early Middle English by forms from other stems (see she), while the h- wore off Old English neuter hit to make modern it. The Proto-Germanic root also is the source of the first element in German heute "today," literally "the day" (compare Old English heodæg).

The paradigm in Old English was: MASCULINE SINGULAR: he (nominative), hine (accusative), his (genitive), him (dative); FEMININE SINGULAR: heo, hio (nom.), hie, hi (acc.), hire (gen. and dat.); NEUTER SINGULAR: hit (nom. and acc.), his (gen.), him (dat.); PLURAL: (all genders) hie, hi (nom. and acc.), hira, heora (gen.), him, heom (dat.).

Pleonastic use with the noun ("Mistah Kurtz, he dead") is attested from late Old English. With animal words, meaning "male" (he-goat, etc.) from c. 1300.

late 14c., a contraction of al be it "al(though) it be (that);" see all be it. Chaucer also uses a past-tense form, al were it.

neuter possessive pronoun; late 16c., from it + genitive/possessive ending 's (q.v.). "[A]t first commonly written it's, a spelling retained by some to the beginning of the 19c." [OED]. The apostrophe came to be omitted, perhaps because it's already was established as a contraction of it is, or by general habit of omitting apostrophes in personal pronouns (hers, yours, theirs, etc.).

The neuter genitive pronoun in Middle English was his, but the clash between grammatical gender and sexual gender, or else the application of the word to both human and non-human subjects, evidently made users uncomfortable. Restriction of his to the masculine and avoidance of it as a neuter pronoun is evidenced in Middle English, and of it and thereof (as in KJV) were used for the neuter possessive. In literary use, his as a neuter pronoun continued into the 17c. In Middle English, simple it sometimes was used as a neuter possessive pronoun (c. 1300).

late 14c., from Old English hit sylf, from it + self. Since 17c. usually regarded as its self (thus its own self, etc.).

Proto-Indo-European root, the stem of demonstrative pronoun meaning "this."

It forms all or part of: cis-; et cetera; harass; he; hence; her; here; him; his; hither; it.

It is the hypothetical source of/evidence for its existence is provided by:  Greek ekeinos "that person;" Latin cis "on this side," citra (adv.) "on this side;" Old Church Slavonic si, Lithuanian is, Hittite ki "this;" Old English hider, Gothic hidre "hither."