1540s, "emptiness of space," from Latin vacuum "an empty space, void," noun use of neuter of vacuus "empty," related to vacare "be empty" (see vain). Properly a loan-translation of Greek xenon, literally "that which is empty." Meaning "a place emptied of air" is attested from 1650s. Vacuum tube is attested from 1859. Vacuum cleaner is from 1903; shortened form vacuum (n.) first recorded 1910.